Item # MX-RIR-PMD-ST-SC-ST-ST, Double-Pass Remote Interferometer/Receiver

DMIs are the primary measurement device for high-precision stage metrology in semiconductor metrology tools and lithography processes for the production of integrated circuits (ICs) and flat panel displays (FPDs). Additional applications include; characterization and calibration of machine tools, stages, piezoelectric transducers, encoders and grid plates.

Motion X Corporation’s line of homodyne DMI systems and components is extremely flexible and can be offered in many configurations that will suit your applications requirements. Our price versus performance is unmatched in the DMI market and we invite you to contact our sales department for more information regarding our line of DMI systems and DMI system components.